Analysis of Key Defect-Related Factors in Wafer Manufacturing Processes Using Big Data

Publications

Publication Type

Domestic Conference

Contribution Type

Poster

Authors

Jun Hyeok Gil & Jang Won Bae

Year

2024

Venue

Spring Joint Conference of the Korean Institute of Industrial Engineers, Operations Research Society of Korea, and Korea Society for Simulation

Citation

–

Keywords

Big Data, Wafer Manufacturing, Defect Analysis, Key Factors