Publications

Deriving and improving Factors Affecting the Adjustment of Semiconductor Wafer Slope Using Regression Analysis

Publication Type

Domestic Conference

Contribution Type

Article

Authors

Jun Hyeok Gil, Nayeong Lee, Yunkyung Shin, & Jang Won Bae

Year

2023

Venue

Spring Joint Conference of the Operations Research Society of Korea and the Korean Institute of Industrial Engineers

Citation

–

Keywords

Wafer Slope, Regression Analysis, Yield Improvement, Factor Identification